A piezo-resistive sensor has a stable structure composed on a silicon chip created using micromachining and semiconductor production technology.
A piezo-resistive sensor has a stable structure composed on a silicon chip created by the micromachining and semiconductor production technology. A mass and a beam on which a set of the piezo-resisters are created on a silicon chip. A set of electrical bridged is formed by such piezo-resistive resisters to generate signals proportional to the applied acceleration.
Measurements are possible over the wide frequency range covering down
from the ultra low up to the high frequency as of several kHz.
Compact and light weight
Highly acceleration resistant
The upper usable frequency depends on the characteristics of dampers composed in the sensor itself. The lower usable frequency goes down to DC.